Posted on by Karin A Crowhurst

Graduate student in the Eller lab wins best student paper award at a conference

Congratulations to Jander Cruz, a graduate student in the Eller lab, who has been awarded the 2022 Hiroshi Ito Memorial Award for the Best Student Paper at the recent SPIE Advanced Lithography + Patterning conference held recently in San Jose, California for his paper titled “Evaluating nanoscale molecular homogeneity in extreme ultraviolet resists with nano projectile secondary ion mass spectrometry”. The award consists of a certificate and a cash honorarium ($1,000). The award is in honor of Hiroshi Ito who is a co-inventor of chemically amplified resists, which is the dominate technology used in semiconductor manufacturing. Jander’s paper can be foundĀ here.

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